Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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!style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance | !style="background:silver; color:black" align="left" rowspan="6" valign="top" |Performance | ||
|style="background:LightGrey; color:black"|Scan range | |style="background:LightGrey; color:black"|Scan range X Y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Line scan | Line scan X: up to 200 mm in a single scan. No stitching. | ||
Map scan | Map scan XY: any rectangle that can be inscribed in a 200 mm circle but note limited resolution (max. 4 million points) | ||
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|style="background:LightGrey; color:black"|Scan range | |style="background:LightGrey; color:black"|Scan range Z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
50 nm to 900 µm (it is possible to measure smaller steps but not recommended as the results may not be accurate) | 50 nm to 900 µm (it is possible to measure smaller steps but not recommended as the results may not be accurate) | ||
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution X Y | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Down to 0.025 µm | Down to 0.025 µm | ||
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|style="background:LightGrey; color:black"|Resolution | |style="background:LightGrey; color:black"|Resolution Z | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm.* | 0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm.* | ||