Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
~ | ~ 17 nm for the 65 kÅ range, ~ 0.22 µm for the intermediate ranges, and ~0.65 µm for the 1 mm range for well-defined steps that are easy to measure reproducibly ([[#Height measurement accuracy for the DektakXT|see below]]) | ||
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W | ||