Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
| Line 48: | Line 48: | ||
!Substrate size | !Substrate size | ||
| | | | ||
* Chips | |||
* 50 mm wafers | * 50 mm wafers | ||
* 100 mm wafers | * 100 mm wafers | ||
| Line 48: | Line 48: | ||
!Substrate size | !Substrate size | ||
| | | | ||
* Chips | |||
* 50 mm wafers | * 50 mm wafers | ||
* 100 mm wafers | * 100 mm wafers | ||