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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-1: Difference between revisions

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Jmli (talk | contribs)
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*[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch|Etch processes with DUV masks]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/DUVetch|Etch processes with DUV masks]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Barc|BARC etches]]


*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic|Isotropic etches]]
*[[Specific Process Knowledge/Etch/DRIE-Pegasus/Isotropic|Isotropic etches]]