Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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|ItemComment= The cross contamination consequences have yet to be determined | |ItemComment= The cross contamination consequences have yet to be determined | ||
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|ItemName= Background knowledge required for safe operation | |||
|ItemConfiguration= Users and supervisors of Pegasus-2 should carefully read the 3 papers listed in the comments in order to have a correct understanding of the etch process and experimental procedure and how it relates to the Bosch etch performance. | |||
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