Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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Whereas most dry etch tools are intended to serve as stable platforms with limited or no changes in hardware, Pegasus 2 will be subject to any kind of experiment. For instance, as of the end of 2020 the RF generator supplying the power to the coil has been disconnected thus allowing only processes driven by the platen generator. This kind of experiment will not be allowed on other dry etch tools. Therefore, you should always make sure that whatever process you may want to run on Pegasus 2 is allowed or even possible. The table below should provide this information. | Whereas most dry etch tools are intended to serve as stable platforms with limited or no changes in hardware, Pegasus 2 will be subject to any kind of experiment. For instance, as of the end of 2020 the RF generator supplying the power to the coil has been disconnected thus allowing only processes driven by the platen generator. This kind of experiment will not be allowed on other dry etch tools. Therefore, you should always make sure that whatever process you may want to run on Pegasus 2 is allowed or even possible. The table below should provide this information. | ||
If you want to get access to the tool, then talk to professor | If you want to get access to the tool, then talk to professor Henri Jansen and the dry etch group. | ||
== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||