Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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* Magnetic Confinement Heater | * Magnetic Confinement Heater | ||
* Chamber Heater | * Chamber Heater | ||
|ItemComment= The temperature on the heaters in the plasma source are set to 20 degrees with a high tolerance. This essentially corresponds to powered off compared to default Pegasus temperatures which are in the 120-140 degrees range.}} | |ItemComment= The temperature on the heaters in the plasma source are set to 20 degrees with a high tolerance. This essentially corresponds to powered off compared to default Pegasus temperatures which are in the 120-140 degrees range. | ||
Always make sure that the temperature settings in the recipes are not enabled as shown below this table. | |||
}} | |||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||
|ItemName= RF power and pressure settings | |ItemName= RF power and pressure settings | ||
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|} | |} | ||
[[file:Peg2tempsettings.jpg | 300px | frameless]] | |||
=== Access to Pegasus 2 configuration templates === | === Access to Pegasus 2 configuration templates === | ||