Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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== Current setup and rules on Pegasus 2 == | == Current setup and rules on Pegasus 2 == | ||
Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | Click [[Specific Process Knowledge/DRIE-Pegasus/Pegasus-2/OldConfig | '''here''']] to access older configurations. | ||
The current configuration is | The current configuration is | ||
{{Template:Peg2configheader1 | {{Template:Peg2configheader1 | ||
|TableHeader= Currently valid from November 2020 onwards | |TableHeader= Currently valid from November 2020 onwards | ||
}} | }} | ||
{{Template:Peg2configcontent1 | {{Template:Peg2configcontent1 | ||
|ItemName= Available gasses and gas chemistry | |ItemName= Available gasses and gas chemistry | ||
|ItemConfiguration= . | |ItemConfiguration= . | ||
* SF<sub>6</sub>: 50 sccm | * SF<sub>6</sub>: 50 sccm | ||
* O<sub>2</sub>: 50 sccm | * O<sub>2</sub>: 50 sccm | ||
* Ar: 283 sccm | * Ar: 283 | ||
* C<sub>4</sub>F<sub>8</sub> (H2 currently fitted but closed) : 0 sccm | |||
* N<sub>2</sub>: 500 sccm | * N<sub>2</sub>: 500 sccm | ||
* He: 11 sccm | * He: 11 sccm | ||
* CO<sub>2</sub>: (It is not in the software) | * CO<sub>2</sub>: (It is not in the software) | ||
|ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up | |ItemComment=OnlySF<sub>6</sub> and O<sub>2</sub> are used for Si, PR, and Cr etch. The rest is only make-up | ||
}} | }} | ||
=== Access to Pegasus 2 configuration templates === | === Access to Pegasus 2 configuration templates === | ||
'''Pegasus 2 configuration table version 1''' | '''Pegasus 2 configuration table version 1''' | ||
* '''Table header''': [[Template:Peg2configheader1]] | * '''Table header''': [[Template:Peg2configheader1]] | ||
* '''Table content''': [[Template:Peg2configcontent1]] | * '''Table content''': [[Template:Peg2configcontent1]] | ||
Revision as of 10:30, 14 December 2020
Feedback to this page: click here
This system is a research tool and not available to the users
If you want to get access to the tool, then talk to professor Henry Jansen
Current setup and rules on Pegasus 2
Click here to access older configurations.
The current configuration is
Access to Pegasus 2 configuration templates
Pegasus 2 configuration table version 1
- Table header: Template:Peg2configheader1
- Table content: Template:Peg2configcontent1
| Item | The currently applied modification | Comments |
|---|---|---|
| Available gasses and gas chemistry | .
|
OnlySF6 and O2 are used for Si, PR, and Cr etch. The rest is only make-up |