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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
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{{Template:Peg2configcontent1
{{Template:Peg2configcontent1
|ItemName=  
|ItemName= Available gasses and gas chemistry
{| | A | B|- | C| D|}Available gasses and gas chemistry
|ItemConfiguration=  
|ItemConfiguration=  
* SF6: 50 sccm
* SF6: 50 sccm
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