Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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{| | {| | ||
| colspan="3 "| C<sub>4</sub>F<sub>8</sub> (H2 currently fitted but closed) : 0 sccm | <-- | colspan="3 "| C<sub>4</sub>F<sub>8</sub> (H2 currently fitted but closed) : 0 sccm /--> | ||
|- | |- | ||
| SF6: 50 sccm | | SF6: 50 sccm | ||