Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
Appearance
| Line 183: | Line 183: | ||
* Verity OES | * Verity OES | ||
|- | |- | ||
!style="background: | !style="background:whitesmoke; color:black" align="center" valign="center" rowspan="4"|Substrates | ||
|style="background:whitesmoke; color:black"|Sizes | |style="background:whitesmoke; color:black"|Sizes | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||