Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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It is a UV LED exposure system, that exposes the patterns directly on photosensitive resists on chips, 2, 4, and 6 inch substrates, without prior fabrication of the mask. | It is a UV LED exposure system, that exposes the patterns directly on photosensitive resists on chips, 2, 4, and 6 inch substrates, without prior fabrication of the mask. | ||
The system offers top side alignment with high accuracy. | The system offers top side alignment with high accuracy. | ||
The logon password for the PC is "mla" (without quotation marks). | |||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||