LabAdviser/Courses/TPT SEM

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The SEM TPT

DTU Nanolab has a number of SEMs (Scanning Electron Microscopes) for different applications. These SEMs are located in building 314, 346 and 375.

DTU Nanolab offers a Tool Package Training (TPT) course in SEM; the course includes theory on SEM, as well as training in instrument operation.

The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab.

SEM Tool Package Training
Schedule	Theoretical part A 3-hour lecture. Sign up for here: https://danchip.doodle.com/poll/udmcihbbgudyynfy. The next lecture(s) will be held on the 10th of August and/or on the 20th of August. Please sign up for both lectures, if you are available both days. Hopefully, the lectures can be held on DTU, but because the number of people in the available rooms at DTU Nanolab is limited, it might be necessary to make online lectures instead or to arrange an extra lecture. If you sign up for the lecture(s), you will get more information later. If you need to use an SEM before the lectures, please write to SEM@nanolab.dtu.dk. Practical part A 2-hour training session, max. 3 persons per session will be planed after the lecture A 2-hour one-on-one hands-on session which will request the participant to pass a “driving test” on the SEM. In this session, the participant will have the opportunity to study their own sample
Location	Theoretical part The location of the lecture will be notified after you have signed up Practical part The training session takes place building 346 room 907(basement). The meeting point will be at the SEM Supra 1
Qualified Prerequisites
Preparations	Before the lecture Read “Scanning Electron Microscopy Primer” by Bob Hafner and some notes that lists some differences between the SEMs described in the primer and the SEMs at Nanolab. You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT\TPT SEM\Learning material, or the primer can be found here Before the first group training session Watch the training videos: You can find them on YouTube: https://www.youtube.com/playlist?list=PLjWVU97LayHAIltgr7pUoeIkwiPuP4Qsj Before the one-on-one hands-on Look at the presentation Media:Operating_SEM_Supra_1_final.pptx Read the user manual for SEM Supra 1 Click here
Course Responsible	The SEM Group at DTU Nanolab (SEM@nanolab.dtu.dk). Sign up for the course by e-mailing to sem@nanolab.dtu.dk.
Learning Objectives	Prepare samples and safely operate SEM Understand possibilities and limitations of SEM Explain SEM electron optics and detectors Optimize and analyse SEM images

Slides from the lecture

• Lecture slide show Media:Nanolab_SEM_lecture_2020_June_LabAdviser.pptx