Specific Process Knowledge/Thin film deposition/Deposition of Aluminium: Difference between revisions
m →Comparison of Al deposition options: name of cluster system changed |
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* Metals | * Metals | ||
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*Almost any - see cross contamination sheet | *Almost any - see [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=244 cross contamination sheet] | ||
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*Almost any - see cross contamination sheets | *Almost any - see cross contamination sheets for [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=441 PC1] and [http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=442 PC3] | ||
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