Specific Process Knowledge/Characterization/Profiler: Difference between revisions
| Line 78: | Line 78: | ||
===Height accuracy=== | ===Height accuracy=== | ||
The accuracy of the height measurement with the profiler depends on the measurement settings as well as the instrument calibration, resolution, and measurement repeatability. | The accuracy of the height measurement with the profiler depends on the measurement settings as well as the sample type, instrument calibration, resolution, and measurement repeatability. | ||
Regarding the measurement settings, both the force setting and the scan speed are important: Too high force may compress a soft material like Al, Au or some polymers, while too low force may lead to the stylus "jumping" over features, especially if the scan speed is high. However, if the scan speed is too low and you are measuring a small step <500 nm, you may experience drift in the measurement. Of course you also must make sure the feature you are measuring is wide enough for the stylus tip to reach the bottom (s'ee the [http://labmanager.dtu.dk/d4Show.php?id=2346&mach=304 DektakXT manual], Figure 3 for details). | |||
We calibrate the instrument with a step height calibration of 9160 Å for the 65 kÅ range and 24.865 µm for the larger ranges. The 95 % confidence intervals for the step height standards is 300 Å for the 9160 Å standard and 0.15 µm for the 24.865 µm standard. | We calibrate the instrument with a step height calibration of 9160 Å for the 65 kÅ range and 24.865 µm for the larger ranges. The 95 % confidence intervals for the step height standards is 300 Å for the 9160 Å standard and 0.15 µm for the 24.865 µm standard. | ||