Specific Process Knowledge/Characterization/Profiler: Difference between revisions
m →Quality control of measurement accuracy: confidence interval added for step height |
→Quality control of measurement accuracy: edited info on calibration |
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|Calibration limit | |Calibration limit | ||
| | |± 0.15 µm | ||
| | |± 102 Å | ||
|- | |- | ||
|Action limit | |Action limit | ||
| | |± 0.11 µm | ||
| | |± 137 Å | ||
|- | |- | ||
|} | |} | ||
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|} | |} | ||
If the average value is | If the average value is outside the calibration limit, the instrument is calibrated straight away. | ||
If two consecutive measurements for a range are outside the action limit, the range should be calibrated. | If the average value is within the calibration limit, but outside of the action limit, the control measurement should be redone after 1 week. If two consecutive measurements for a range are outside the action limit, the range should be calibrated. | ||
The | The accuracy of the step height calibration is 0.15 µm for the 24.865 µm standard and 30 Å for the 9160 Å standard. These values are equivalent to twice the standard deviation, or 95 % confidence intervals. | ||
==Dektak 8 stylus profiler== | ==Dektak 8 stylus profiler== | ||