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The fast electron beam can lose energy by exciting electrons in the outer or inner atomic shells of atoms to higher unoccupied energy states. Outer-shell single electron excitations can be seen as peaks at energies up to ~ 50 eV in the energy-loss spectrum. At higher energies the scattering intensity decreases according to a high power of the energy-loss and inner-shell electron excitations are seen as edges superimposed on this smoothly decreasing background (marked as ionisation edge in Fig. 1). In addition, the energy-loss spectrum can contain peaks corresponding to plasmon excitations. Plasmons can be excited within the specimen, i.e. a bulk plasmon, or at an interface, i.e. an interface plasmon. Plasmons generally occur in the range 5 – 30 eV, at energies higher than the band gap of the material. The first 50 eV of an energy-loss spectrum is usually referred to as the low-loss region. Higher energy-loss regions containing inner-shell ionisation edges are usually referred to as the core-loss region.
The fast electron beam can lose energy by exciting electrons in the outer or inner atomic shells of atoms to higher unoccupied energy states. Outer-shell single electron excitations can be seen as peaks at energies up to ~ 50 eV in the energy-loss spectrum. At higher energies the scattering intensity decreases according to a high power of the energy-loss and inner-shell electron excitations are seen as edges superimposed on this smoothly decreasing background (marked as ionisation edge in Fig. 1). In addition, the energy-loss spectrum can contain peaks corresponding to plasmon excitations. Plasmons can be excited within the specimen, i.e. a bulk plasmon, or at an interface, i.e. an interface plasmon. Plasmons generally occur in the range 5 – 30 eV, at energies higher than the band gap of the material. The first 50 eV of an energy-loss spectrum is usually referred to as the low-loss region. Higher energy-loss regions containing inner-shell ionisation edges are usually referred to as the core-loss region.
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== more detailed information ==
*[[LabAdviser/314/Microscopy 314-307/Technique/X-ray_spectroscopy/EDS-SEM|EDS-SEM with Oxford Aztec]]
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== literature ==
Literature?