Jump to content

Specific Process Knowledge/Characterization/Profiler: Difference between revisions

Reet (talk | contribs)
Reet (talk | contribs)
Dektak 8 stylus profiler: added QC section
Line 168: Line 168:
|-  
|-  
|}
|}
===Quality control of measurement accuracy===
{| border="1" cellspacing="2" cellpadding="2" colspan="3"
|bgcolor="#98FB98" |'''Quality Control (QC) for DektakXTA'''
|-
|
*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=123 QC procedure for Dektak 8]<br>
*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=123 Newest QC data for Dektak 8]<br>
{| {{table}}
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
!QC limits
!Standard step height 24.865 µm
!Standard step height 9160 Å
|-
|Calibration limit
|24.865 ± 0.15 µm
|9160 ± 102 Å
|-
|Action limit
|24.865 ± 0.11 µm
|9160 ± 137 Å
|-
|}
|-
|}
|}
If the average value is within the calibration limit, but outside of the action limit, the control measurement should be redone after 1 week.
If two consecutive measurements for a range are outside the action limit, the range should be calibrated.


==Optical Profiler (Sensofar)==
==Optical Profiler (Sensofar)==