Specific Process Knowledge/Characterization/Profiler: Difference between revisions

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 |}
+==Quality control of measurement accuracy==
+{| border="1" cellspacing="2" cellpadding="2" colspan="3"
+|bgcolor="#98FB98" |'''Quality Control (QC) for DektakXTA'''
+|-
+|
+*[http://labmanager.dtu.dk/d4Show.php?id=2493&mach=304 QC procedure for DektakXTA]<br>
+*[https://labmanager.dtu.dk/view_binary.php?type=data&mach=304 Newest QC data for DektakXTA]<br>
+{| {{table}}
+| align="center" valign="top"|
+{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
+!QC limits
+!Standard step height 24.865 µm
+!Standard step height 9160 Å
+|-
+|Calibration limit
+|24.865 ± 0.15 µm
+|9160 ± 102 Å
+|-
+|Action limit
+|24.865 ± 0.11 µm
+|9160 ± 137 Å
+|-
+|}
+|-
+|}
+|}
+If the average value is within the calibration limit, but outside of the action limit, the control measurement should be redone after 1 week.
+If two consecutive measurements for a range are outside the action limit, the range should be calibrated.
 ==Dektak 8 stylus profiler==