Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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*Rq: 0.224 nm | *Rq: 0.224 nm | ||
[[File:Roughness on Si 5 Tapping mode with RFESP-75 CL on.JPG|400px]] | [[File:Roughness on Si 5 Tapping mode with RFESP-75 CL on.JPG|400px]] | ||
===Step measurement: Resist on silicon oxide=== | |||