Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
| Line 225: | Line 225: | ||
*#*Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
*#*Rq: 0.247 nm | *#*Rq: 0.247 nm | ||
[[File:Roughness on Si 1 ScanAsyst with ScanAsyst-air CL on.JPG|400px]] | |||
*#ScanAsyst with ScanAsyst-air | *#ScanAsyst with ScanAsyst-air | ||
*#*CL off | *#*CL off | ||
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*#*Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
*#*Rq: 0.235 nm | *#*Rq: 0.235 nm | ||
[[File:Roughness on Si 2 ScanAsyst with ScanAsyst-air CL off.JPG|400px]] | |||
*#ScanAsyst with TAP150A | *#ScanAsyst with TAP150A | ||
*#*CL on | *#*CL on | ||
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*#*0dg | *#*0dg | ||
*#*ScanAsyst noise threshold: 1 | *#*ScanAsyst noise threshold: 1 | ||
*#*PeakForce | *#*PeakForce amplitude 75 nm (was set as standard from the probe settings) | ||
*#*Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
*#*Rq: 0.238/0.250 nm | *#*Rq: 0.238/0.250 nm | ||
[[File:Roughness on Si 3 ScanAsyst with TAP150A CL on A.JPG|400px]][[File:Roughness on Si 3 ScanAsyst with TAP150A CL on B.JPG|400px]] | |||
*#Tapping mode with TAP150A | *#Tapping mode with TAP150A | ||
*#*CL on | *#*CL on | ||
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*#*0dg | *#*0dg | ||
*#*Rq: 0.214 nm | *#*Rq: 0.214 nm | ||
[[File:Roughness on Si 4 Tapping mode with TAP150A CL on.JPG|400px]] | |||
*#Tapping mode with RFESP-75 | *#Tapping mode with RFESP-75 | ||
*#*CL on | *#*CL on | ||
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*#*0dg | *#*0dg | ||
*#*Rq: 0.224 nm | *#*Rq: 0.224 nm | ||
[[File:Roughness on Si 5 Tapping mode with RFESP-75 CL on.JPG|400px]] | |||