Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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===Demonstrating roughness measurements on silicon=== | ===Demonstrating roughness measurements on silicon=== | ||
#ScanAsyst with ScanAsyst-air | |||
*#ScanAsyst with ScanAsyst-air | |||
*#*CL on | *#*CL on | ||
*512x512 | *#*512x512 | ||
*0dg | *#*0dg | ||
*ScanAsyst noise threshold: 1 | *#*ScanAsyst noise threshold: 1 | ||
*PeakForce amplitide 300 nm | *#*PeakForce amplitide 300 nm | ||
*Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
*Rq: 0.247 nm | *#*Rq: 0.247 nm | ||
#ScanAsyst with ScanAsyst-air | *#ScanAsyst with ScanAsyst-air | ||
**CL off | *#*CL off | ||
**512x512 | *#*512x512 | ||
**0dg | *#*0dg | ||
**ScanAsyst noise threshold: 0.2 | *#*ScanAsyst noise threshold: 0.2 | ||
**PeakForce amplitide 300 nm | *#*PeakForce amplitide 300 nm | ||
**Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
**Rq: 0.235 nm | *#*Rq: 0.235 nm | ||
#ScanAsyst with TAP150A | *#ScanAsyst with TAP150A | ||
**CL on | *#*CL on | ||
**512x512 | *#*512x512 | ||
**0dg | *#*0dg | ||
**ScanAsyst noise threshold: 1 | *#*ScanAsyst noise threshold: 1 | ||
**PeakForce amplitide 75 nm (was set as standard from the probe settings) | *#*PeakForce amplitide 75 nm (was set as standard from the probe settings) | ||
**Peak force frequency: 2 Hz | *#*Peak force frequency: 2 Hz | ||
**Rq: 0.238/0.250 nm | *#*Rq: 0.238/0.250 nm | ||
#Tapping mode with TAP150A | *#Tapping mode with TAP150A | ||
**CL on | *#*CL on | ||
**512x512 | *#*512x512 | ||
**0dg | *#*0dg | ||
**Rq: 0.214 nm | *#*Rq: 0.214 nm | ||
#Tapping mode with RFESP-75 | *#Tapping mode with RFESP-75 | ||
**CL on | *#*CL on | ||
**512x512 | *#*512x512 | ||
**0dg | *#*0dg | ||
**Rq: 0.224 nm | *#*Rq: 0.224 nm | ||