Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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===Demonstrating roughness measurements on silicon=== | ===Demonstrating roughness measurements on silicon=== | ||
#ScanAsyst with ScanAsyst-air | #ScanAsyst with ScanAsyst-air | ||
*CL on | |||
*512x512 | |||
*0dg | |||
*ScanAsyst noise threshold: 1 | |||
*PeakForce amplitide 300 nm | |||
*Peak force frequency: 2 Hz | |||
*Rq: 0.247 nm | |||
#ScanAsyst with ScanAsyst-air | |||
**CL off | **CL off | ||
**512x512 | **512x512 | ||