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Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions

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===Demonstrating roughness measurements on silicon===
===Demonstrating roughness measurements on silicon===
*ScanAsyst with ScanAsyst-air
#ScanAsyst with ScanAsyst-air
**CL on
**CL on
**512x512
**512x512
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**Peak force frequency: 2 Hz
**Peak force frequency: 2 Hz
**Rq: 0.247 nm
**Rq: 0.247 nm
*ScanAsyst with ScanAsyst-air
#ScanAsyst with ScanAsyst-air
**CL off
**CL off
**512x512
**512x512
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**Peak force frequency: 2 Hz
**Peak force frequency: 2 Hz
**Rq: 0.235 nm
**Rq: 0.235 nm
*ScanAsyst with TAP150A
#ScanAsyst with TAP150A
**CL on
**CL on
**512x512
**512x512
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**Peak force frequency: 2 Hz
**Peak force frequency: 2 Hz
**Rq: 0.238/0.250 nm
**Rq: 0.238/0.250 nm
*Tapping mode with TAP150A
#Tapping mode with TAP150A
**CL on
**CL on
**512x512
**512x512
**0dg
**0dg
**Rq: 0.214 nm
**Rq: 0.214 nm
*Tapping mode with RFESP-75
#Tapping mode with RFESP-75
**CL on
**CL on
**512x512
**512x512
**0dg
**0dg
**Rq: 0.224 nm
**Rq: 0.224 nm