Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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===Demonstrating roughness measurements on silicon=== | ===Demonstrating roughness measurements on silicon=== | ||
#ScanAsyst with ScanAsyst-air | |||
**CL on | **CL on | ||
**512x512 | **512x512 | ||
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**Peak force frequency: 2 Hz | **Peak force frequency: 2 Hz | ||
**Rq: 0.247 nm | **Rq: 0.247 nm | ||
#ScanAsyst with ScanAsyst-air | |||
**CL off | **CL off | ||
**512x512 | **512x512 | ||
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**Peak force frequency: 2 Hz | **Peak force frequency: 2 Hz | ||
**Rq: 0.235 nm | **Rq: 0.235 nm | ||
#ScanAsyst with TAP150A | |||
**CL on | **CL on | ||
**512x512 | **512x512 | ||
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**Peak force frequency: 2 Hz | **Peak force frequency: 2 Hz | ||
**Rq: 0.238/0.250 nm | **Rq: 0.238/0.250 nm | ||
#Tapping mode with TAP150A | |||
**CL on | **CL on | ||
**512x512 | **512x512 | ||
**0dg | **0dg | ||
**Rq: 0.214 nm | **Rq: 0.214 nm | ||
#Tapping mode with RFESP-75 | |||
**CL on | **CL on | ||
**512x512 | **512x512 | ||
**0dg | **0dg | ||
**Rq: 0.224 nm | **Rq: 0.224 nm | ||