Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
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===Demonstrating roughness measurements on silicon=== | |||
*ScanAsyst with ScanAsyst-air | |||
**CL on | |||
**512x512 | |||
**0dg | |||
**ScanAsyst noise threshold: 1 | |||
**PeakForce amplitide 300 nm | |||
**Peak force frequency: 2 Hz | |||
**Rq: 0.247 nm | |||
*ScanAsyst with ScanAsyst-air | |||
**CL off | |||
**512x512 | |||
**0dg | |||
**ScanAsyst noise threshold: 0.2 | |||
**PeakForce amplitide 300 nm | |||
**Peak force frequency: 2 Hz | |||
**Rq: 0.235 nm | |||
*ScanAsyst with TAP150A | |||
**CL on | |||
**512x512 | |||
**0dg | |||
**ScanAsyst noise threshold: 1 | |||
**PeakForce amplitide 75 nm (was set as standard from the probe settings) | |||
**Peak force frequency: 2 Hz | |||
**Rq: 0.238/0.250 nm | |||
*Tapping mode with TAP150A | |||
**CL on | |||
**512x512 | |||
**0dg | |||
**Rq: 0.214 nm | |||
*Tapping mode with RFESP-75 | |||
**CL on | |||
**512x512 | |||
**0dg | |||
**Rq: 0.224 nm | |||