Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/AFM Icon Acceptance: Difference between revisions
Appearance
| Line 194: | Line 194: | ||
===Noise tests=== | ===Noise tests=== | ||
====Sensor noise==== | ====Sensor noise==== | ||
Tapping ]mode, OTESPA-R3 probe used. <br> | |||
First we made a false engage (scanning in air): | First we made a false engage (scanning in air): | ||
Turn off gain 0 0 <br> | Turn off gain 0 0 <br> | ||
Z range 0.2my <br> | Z range 0.2my <br> | ||
Scan size 0.01nm <br> | Scan size 0.01nm <br> | ||
Roughness: Rq 27 pm (specs 35pm) <br> | |||
[ | [Media:scanner noise.JPG|400px] | ||
<br clear="all" /> | |||
====System noise==== | ====System noise==== | ||