Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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===This system is a research tool and not available to the users=== | ===This system is a research tool and not available to the users=== | ||
If you want to get access to the tool, then take to professor Henry Jansen | If you want to get access to the tool, then take to professor Henry Jansen | ||
* [[/Nanoscale silicon etching with | * [[/Nanoscale silicon etching with SF<sub>6</sub> and O<sub>2</sub>|Nanoscale silicon etching with SF<sub>6</sub> and O<sub>2</sub> ]] | ||
* [[Specific Process Knowledge/Etch/DRIE-Pegasus/Si Nano Etching|Black silicon on Demand]] | * [[Specific Process Knowledge/Etch/DRIE-Pegasus/Si Nano Etching|Black silicon on Demand]] | ||
Revision as of 11:32, 11 May 2020
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This system is a research tool and not available to the users
If you want to get access to the tool, then take to professor Henry Jansen
- [[/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]]
- Black silicon on Demand