Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2: Difference between revisions
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===This system is a research tool and not available to the users=== | ===This system is a research tool and not available to the users=== | ||
If you want to get access to the tool, then take to professor Henry Jansen | If you want to get access to the tool, then take to professor Henry Jansen | ||
* [[/Nanoscale silicon etching with | * [[/Nanoscale silicon etching with SF6 and O2|Nanoscale silicon etching with SF6 and O2 ]] | ||
*[[/Si Nano Etching|Black silicon on Demand]] | *[[/Si Nano Etching|Black silicon on Demand]] | ||
* [[/Etch silicon nanostructures|Etch silicon nanostructures ]] | * [[/Etch silicon nanostructures|Etch silicon nanostructures ]] | ||
Revision as of 11:26, 11 May 2020
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This system is a research tool and not available to the users
If you want to get access to the tool, then take to professor Henry Jansen