Specific Process Knowledge/Thin film deposition: Difference between revisions
Appearance
| Line 8: | Line 8: | ||
| align="left" valign="top" style="background:LightGray"|''' Semiconductors''' | | align="left" valign="top" style="background:LightGray"|''' Semiconductors''' | ||
| align="left" valign="top" style="background:#DCDCDC;"|''' Oxides''' | | align="left" valign="top" style="background:#DCDCDC;"|''' Oxides''' | ||
| align="left" valign="top" style="background:LightGray"|''' | | align="left" valign="top" style="background:LightGray"|''' Nitrides''' | ||
| align="left" valign="top" style="background:#DCDCDC;"|''' | | align="left" valign="top" style="background:#DCDCDC;"|''' Metals''' | ||
| align="left" valign="top" style="background:LightGray"|''' Alloys''' | | align="left" valign="top" style="background:LightGray"|''' Alloys''' | ||
| align="left" valign="top" style="background:#DCDCDC;"|''' Transparent conductive oxides''' | | align="left" valign="top" style="background:#DCDCDC;"|''' Transparent conductive oxides''' | ||
| Line 30: | Line 30: | ||
|style="background: LightGray"| | |||
[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/> | |||
[[/Deposition of Titanium Nitride|Titanium Nitride]] - ''conductive ceramics'' <br/> | |||
[[/Deposition of Aluminium Nitride| Aluminum Nitride (Al<sub>x</sub>N<sub>y</sub>)]]<br/> | |||
|style="background: | |style="background: #DCDCDC"| | ||
[[/Deposition of Aluminium|Aluminium]] <br/> | [[/Deposition of Aluminium|Aluminium]] <br/> | ||
[[/Deposition of Chromium|Chromium]]<br/> | [[/Deposition of Chromium|Chromium]]<br/> | ||
| Line 54: | Line 58: | ||
|style="background: LightGray"| | |style="background: LightGray"| | ||