Specific Process Knowledge/Thin film deposition: Difference between revisions

Sputter-system Metal-Oxide (PC1) and Sputter-system Metal-Nitride (PC3) - Cluster-based multi-chamber high vacuum sputtering deposition system
Lesker - Sputter tool
Wordentec - E-beam evaporator, sputter and thermal evaporator
Thermal evaporator
E Beam Evaporator (Temescal)
Physimeca - E-beam evaporator
IBE/IBSD Ionfab 300 - Sputter deposition of high quality optical layers and milling/etching
Sputter coater 03 - Gold sputtering system
Sputter coater 04 - Gold sputtering system

See the Lithography/Coaters page for coating polymers

MVD - Molecular Vapor Deposition
Electroplating-Ni - Electrochemical deposition of nickel
Electroplating-Cu - Electrochemical deposition of copper
MOCVD - Epitaxial growth - Ask the department of photonics if you are interested: Elizaveta Semenova or Kresten Yvind

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 | align="left" valign="top"  style="background:LightGray"|''' Semiconductors'''
 | align="left" valign="top" style="background:#DCDCDC;"|''' Oxides'''
-| align="left" valign="top" style="background:LightGray"|''' Metals'''
+| align="left" valign="top" style="background:LightGray"|''' Nitrides'''
-| align="left" valign="top" style="background:#DCDCDC;"|''' Nitrides'''
+| align="left" valign="top" style="background:#DCDCDC;"|''' Metals'''
 | align="left" valign="top" style="background:LightGray"|''' Alloys'''
 | align="left" valign="top" style="background:#DCDCDC;"|''' Transparent conductive oxides'''
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+|style="background: LightGray"|
+[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/>
+[[/Deposition of Titanium Nitride|Titanium Nitride]] - ''conductive ceramics'' <br/>
+[[/Deposition of Aluminium Nitride| Aluminum Nitride (Al<sub>x</sub>N<sub>y</sub>)]]<br/>
-|style="background: LightGray"|
+|style="background: #DCDCDC"|
 [[/Deposition of Aluminium|Aluminium]] <br/>
 [[/Deposition of Chromium|Chromium]]<br/>
@@ Line 54: / Line 58: @@
-|style="background: #DCDCDC"|
-[[/Deposition of Silicon Nitride|Silicon Nitride]] - ''and oxynitride'' <br/>
-[[/Deposition of Titanium Nitride|Titanium Nitride]] - ''conductive ceramics'' <br/>
-[[/Deposition of Aluminium Nitride| Aluminum Nitride (Al<sub>x</sub>N<sub>y</sub>)]]<br/>
 |style="background: LightGray"|