Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
| Line 3: | Line 3: | ||
[[Category: Equipment |Characterization Optical]] | [[Category: Equipment |Characterization Optical]] | ||
[[Category: Characterization|Optical]] | [[Category: Characterization|Optical]] | ||
==Comparison of the | ==Comparison of the methods== | ||
For comparison of the | For comparison of the methods for measuring optical constants and film thickness, see here: [[Specific Process Knowledge/Characterization/Measurement of film thickness and optical constants#Film_thickness_and_optical_constants_of_optical_transparent_films|Film thickness and optical constants of optical transparent films]] | ||
==Ellipsometer VASE and Ellipsometer M-2000V == | ==Ellipsometer VASE and Ellipsometer M-2000V == | ||