Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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All the profilers are compared on the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | All the profilers are compared on the [[Specific Process Knowledge/Characterization/Topographic measurement|topographic measurement]] page. | ||
The sections below describe each profiler in more detail. | The sections below describe each profiler (Dektak stylus profilers and optical profilers) in more detail. | ||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=123 Dektak 8 in LabManager] | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=123 Dektak 8 in LabManager] | ||
The original user manual can be obtained from the staff. | |||
===Equipment performance and process related parameters Dektak 8 stylus profiler=== | ===Equipment performance and process related parameters Dektak 8 stylus profiler=== | ||