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!style="background:Black; color:white" width="5%" align ="center"|Mandatory...
!style="background:Black; color:white" width="5%" align ="center"|Mandatory...
!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription
!style="background:Black; color:white" width="10%" align ="center"|Short Course Decription
!style="background:Black; color:white" width="5%" align ="center"|Links to course page
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|-style="background:WhiteSmoke; color:black" valign="center"
|-style="background:WhiteSmoke; color:black" valign="center"
!Introduction course
![http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course]
|for working inside the cleanroom
|for working inside the cleanroom
|See the homepage
|See the homepage
|[http://www.nanolab.dtu.dk/english/education/courses/introduction-course Introduction course information on the Nanolab homepage]
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|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|for working with [[Specific_Process_Knowledge/Lithography|lithography]]
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
|[[/TPT Lithography|TPT Lithography]]
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|-
|-style="background:WhiteSmoke; color:black" valign="center"
|-style="background:WhiteSmoke; color:black" valign="center"
!Mask Design
![[/Mask Design|Mask Design]]
|no
|no
|The course is recommended all users who intend to design their own masks for lithography.
|The course is recommended all users who intend to design their own masks for lithography.
|[[/Mask Design|Mask Design]]
|-
|-
|-style="background:LightGrey; color:black" valign="center"
|-style="background:LightGrey; color:black" valign="center"
!TPT SEM
![[/TPT SEM|TPT SEM]]
|for getting access to SEMs at Nanolab building 346
|for getting access to SEMs at Nanolab building 346
|The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab building 346.  
|The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab building 346.  
|[[/TPT SEM|TPT SEM]]
|-
|-
|-style="background:WhiteSmoke; color:black" valign="center"
|-style="background:WhiteSmoke; color:black" valign="center"
!TPT Dry Etch
![[/TPT Dry Etch|TPT Dry Etch]]
|for getting access to dry etch equipment
|for getting access to dry etch equipment
|The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
|The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
|[[/TPT Dry Etch|TPT Dry Etch]]
|-
|-
|-style="background:LightGrey; color:black" valign="center"
|-style="background:LightGrey; color:black" valign="center"
!TPT Thin Film
![[/TPT Thin Film|TPT Thin Film]]
|for getting access to thin film deposition/growth equipment
|for getting access to thin film deposition/growth equipment
|This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.  
|This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.  
|[[/TPT Thin Film|TPT Thin Film]]
|-
|-
|-style="background:WhiteSmoke; color:black" valign="center"
|-style="background:WhiteSmoke; color:black" valign="center"
!Ph.d. course
![https://kurser.dtu.dk/course/10868 Ph.d. course: 10868 Methods in micro and nano fabrication]
|for ph.d. students at Nanolab
|for ph.d. students at Nanolab
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.
|This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.
|[https://kurser.dtu.dk/course/10868 10868 Methods in micro and nano fabrication]
|-
|-
|}
|}

Revision as of 10:55, 6 April 2020

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Courses

We are building up a number of courses to educate our users in using the cleanroom facility and the equipment inside. Below you can see the courses that are presently running. The "Cleanroom introduction Course" is mandatory for all users that need to enter the cleanroom facility on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you need to use inside the facility.

Course Mandatory... Short Course Decription
Introduction course for working inside the cleanroom See the homepage
TPT Lithography for working with lithography The course includes theory on lithographic processes and equipment, as well as training in equipment operation and processing in the cleanroom. The course is for all users that intend to perform any kind of lithographic processing in the cleanroom, and is a prerequisite for training in other lithography equipment.
Mask Design no The course is recommended all users who intend to design their own masks for lithography.
TPT SEM for getting access to SEMs at Nanolab building 346 The course includes theory about SEM, as well as training in instrument operation. The course is for all users who intend to perform any kind of SEM related process and is a prerequisite for training in any of the SEM at Nanolab building 346.
TPT Dry Etch for getting access to dry etch equipment The course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom. The course is for all users who intend to perform any kind of dry etching in the cleanroom, and is a prerequisite for training in any of the dry etch equipment.
TPT Thin Film for getting access to thin film deposition/growth equipment This is a theoretical course introducing the deposition and growth techniques available at DTU Nanolab. The Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures before they apply for a training.
Ph.d. course: 10868 Methods in micro and nano fabrication for ph.d. students at Nanolab This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points.