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Specific Process Knowledge/Lithography/Development: Difference between revisions

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Please watch if the developer and rinsing starts. If not try to restart the machine by pressing the EMO and turning it on again.  
Please watch if the developer and rinsing starts. If not try to restart the machine by pressing the EMO and turning it on again.  
The spray is 8-10 s and will start the development process hence the short recipes (10s and 30s.) have been adjusted according to this.
The spray is 8-10 s and will start the development process hence the short recipes (10s and 30s.) have been adjusted according to this.
6" have some uniformity issues but the recipes are being modified to compensate for this.


'''Process recipes'''
'''Process recipes'''
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