Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4: Difference between revisions

Revision as of 16:17, 25 March 2020 view source Qugig (talk \| contribs) NLAB-Employees-701 5 edits No edit summary ← Older edit		Revision as of 16:18, 25 March 2020 view source Qugig (talk \| contribs) NLAB-Employees-701 5 edits →Pegasus 4 - 150mm silicon oxide and silicon nitride etching Newer edit →
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	~~'''~~The user manual(s), quality control procedure(s) and results, user APV(s) are not available, technical information and contact information can be found in LabManager:~~'''~~		The user manual(s), quality control procedure(s) and results, user APV(s) '''are not available''', technical information and contact information can be found in LabManager:

	Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=265\| LabManager]		Equipment info in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=265\| LabManager]