Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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[[Specific Process Knowledge/Etch/DRIE-Pegasus/System-description#RF_matching_in_general|<span style="background:fuchsia">Reflected Coil Power</span>]] below. The spikes in Coil Power at every point where the Reflected is not zero indicates that the Coil Power is running in Load mode (as opposed to Forward mode) where the power lost as reflected power is compensated for by increasing the input power. | [[Specific Process Knowledge/Etch/DRIE-Pegasus/System-description#RF_matching_in_general|<span style="background:fuchsia">Reflected Coil Power</span>]] below. The spikes in Coil Power at every point where the Reflected is not zero indicates that the Coil Power is running in Load mode (as opposed to Forward mode) where the power lost as reflected power is compensated for by increasing the input power. | ||
Process A has 4 second dep phase and 7 second (1.5 second break and 5.5 second main) and the SPTS Pro software samples the process parameters every 0.5 second. This produces plots as seen above where all measurements have markers. One can ask the questions: | Process A has 4 second dep phase and 7 second (1.5 second break and 5.5 second main) and the SPTS Pro software samples the process parameters every 0.5 second. This produces plots as seen above to the left where all measurements have markers. One can ask the questions: | ||
# What happens if the cycle duration is lowered in order produce smaller scallops? | # What happens if the cycle duration is lowered in order produce smaller scallops? | ||
# How do we know if something that is very brief happens? For instance, spikes in reflected power can be rather short lived as indicated by the one point spikes of reflected coil power above. | # How do we know if something that is very brief happens? For instance, spikes in reflected power can be rather short lived as indicated by the one point spikes of reflected coil power above. | ||