Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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When running any recipe on the SPTS Pro software, a set of process parameters are recorded as the process runs. This data can be accessed later by looking up the datalog. Which parameters are recorded is dictated by the so-called logging recipe that is selected for every process recipe. The list of possible parameters to include in a logging recipe is long and is comprised of both input parameters such as 'Coil forward power demand' and 'SF<sub>6</sub> flow setpoint', and measured values such as 'Platen temperature' and 'Platen DC Bias'. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. | When running any recipe on the SPTS Pro software, a set of process parameters are recorded as the process runs. This data can be accessed later by looking up the datalog. Which parameters are recorded is dictated by the so-called logging recipe that is selected for every process recipe. The list of possible parameters to include in a logging recipe is long and is comprised of both input parameters such as 'Coil forward power demand' and 'SF<sub>6</sub> flow setpoint', and measured values such as 'Platen temperature' and 'Platen DC Bias'. During the process itself, one can also activate the 'Trace' to monitor the process parameters in real time. | ||
To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. | To the left in the figure below, some of the most important process parameters are shown for a process run of the recipe Process A. A total of four cycles are shown with each cycle separated by white vertical lines. | ||
<gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | <gallery caption="4 cycles of Process A " widths="400" heights="500" perrow="2"> | ||
image:Process A SPTS.png | Left: Recorded with the SPTS software | image:Process A SPTS.png | Left: Recorded with the SPTS software | ||