Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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If you need a training on the machine please send your request to: training@nanolab.dtu.dk. | If you need a training on the machine please send your request to: training@nanolab.dtu.dk. | ||
= Sputter-System Metal-Oxide(PC1) = | |||
Bla bla | |||
= Sputter-System Metal-Oxide(PC3) = | = Sputter-System Metal-Oxide(PC3) = | ||