Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope: Difference between revisions
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= New recipes= | = New recipes= | ||
The finetuning of recipes made possible by the picoscope has been researched a lot by the group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab. Below is a list of publications: | The idea of int | ||
The finetuning of Bosch recipes made possible by the picoscope has been researched a lot by the group of professor [https://www.dtu.dk/service/telefonbog/person?id=103402&cpid=191195&tab=1 Henri Jansen] at DTU Nanolab. Below is a list of publications: | |||
*[[:file:DREM1.pdf | Bingdong Chang et al.: DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process]] | *[[:file:DREM1.pdf | Bingdong Chang et al.: DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process]] | ||
*[[:file:DREM2.pdf | Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process]] | *[[:file:DREM2.pdf | Bingdong Chang et al.: DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process]] | ||