Specific Process Knowledge/Thin film deposition/thermalevaporator: Difference between revisions
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Thicknesses are measured in 5 points with one of the Dektak instruments. <br> | Thicknesses are measured in 5 points with one of the Dektak instruments. <br> | ||
Additionally we monitor the state of the Al crucible and ensure that it does not contain | Additionally we monitor the state of the Al crucible and ensure that it does not contain too much Al as this can wet the outside and short circuit the heater. | ||
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