Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions
| Line 71: | Line 71: | ||
|- | |- | ||
!Dry1050 | !Dry1050 | ||
| | |107.3 nm - 113.3 nm | ||
|3 % | |3.2 % | ||
|- | |- | ||
!Wet1050 | !Wet1050 | ||
| | |298.2 nm - 305.5 nm | ||
| | |3.7 % | ||
|- | |- | ||
|} | |} | ||
| Line 82: | Line 82: | ||
|} | |} | ||
|} | |} | ||
Numbers from March 2020 | |||
==Overview of the performance of the Boron Drive-in + Pre-dep furnace and some process related parameters== | ==Overview of the performance of the Boron Drive-in + Pre-dep furnace and some process related parameters== | ||