Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 170: | Line 170: | ||
| | | | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br> | ||
*[http://labmanager.dtu.dk/view_binary.php?fileId= | *[http://labmanager.dtu.dk/view_binary.php?fileId=4226 The newest QC data for KS Aligner] | ||
{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||
| Line 204: | Line 204: | ||
Power supply and/or lamp will be adjusted if intensity is outside the limit. | Power supply and/or lamp will be adjusted if intensity is outside the limit. | ||
|} | |} | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||