Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Power supply and/or lamp will be adjusted if intensity is outside the limit. | Power supply and/or lamp will be adjusted if intensity is outside the limit. | ||
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====Alignment==== | ====Alignment==== | ||
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**Low: 1.5mm x 2mm (3mm x 2mm full field) | **Low: 1.5mm x 2mm (3mm x 2mm full field) | ||
**High: 450µm x 650µm (950µm x 650µm full field) | **High: 450µm x 650µm (950µm x 650µm full field) | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||