Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
Appearance
| Line 186: | Line 186: | ||
|} | |} | ||
| align="center" valign="top"| | | align="center" valign="top"| | ||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width: | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | ||
!QC limits | !QC limits | ||
!KS Aligner | !KS Aligner | ||