Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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 *[[Specific Process Knowledge/Lithography/UVExposure_Dose|Information on UV exposure dose]]
 ====Quality Control (QC)====
+'''THIS SECTION IS UNDER CONSTRUCTION''' [[Image:section under construction.jpg|70px]]
+{| border="1" cellspacing="2" cellpadding="2" colspan="3"
+|bgcolor="#98FB98" |'''Quality Control (QC) for KS Aligner [[Image:section under construction.jpg|70px]] '''
+|-
+|
+*[http://labmanager.dtu.dk/d4Show.php?id=5644&mach=44 The QC procedure for KS Aligner]<br>
+*[http://labmanager.dtu.dk/view_binary.php?fileId=3838 The newest QC data for KS Aligner]
+{| {{table}}
+| align="center" |
+{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:300px"
+! QC Recipe:
+! Manual intensity measurement
+|-
+|Measurement area
+|4"
+|-
+|Number of measurements
+|5
+|-
+|}
+| align="center" valign="top"|
+{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:300px"
+!QC limits
+!KS Aligner
+|-
+|Nominal intensity
+|8 mW/cm<sup>2</sup>
+|-
+|Intensity deviation from nominal
+|≤5%
+|-
+|Intensity non-uniformity
+|≤2%
+|-
+|}
+|-
+|}
+Power supply and/or lamp will be adjusted if intensity is outside the limit.
+|}
 ====Alignment====