Specific Process Knowledge/Thermal Process: Difference between revisions
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*[[/Storage and cleaning of wafer to the A, B, C and E stack furnaces|Storage and cleaning of wafer to the A and C stack furnaces]] | *[[/Storage and cleaning of wafer to the A, B, C and E stack furnaces|Storage and cleaning of wafer to the A and C stack furnaces]] | ||
== Manuale for the furnace computer to the A, B, C and E stack furnaces == | |||
Furnace_computer_manual.pdf | |||
== Decommissioned equipment == | == Decommissioned equipment == | ||