Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 640: | Line 640: | ||
*Flood exposure | *Flood exposure | ||
*Proximity exposure with mask possible for 4inch substrate | *Proximity exposure with mask possible for 4inch substrate | ||
*Inclined exposure | |||
*Rotating exposure | |||
|- | |- | ||
| style="background:LightGrey; color:black"|Exposure light/filters | | style="background:LightGrey; color:black"|Exposure light/filters | ||