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Specific Process Knowledge/Lithography/UVExposure: Difference between revisions

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The aligner can also be used for bond alignment (for Wafer Bonder 02). Special training is required.
The aligner can also be used for bond alignment (for Wafer Bonder 02). Special training is required.


'''Training videos: [http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part1_operation-720p.mp4 Operation] [http://podcast.llab.dtu.dk/fileadmin/podcasts/2016/DTUDanchip/1.053_Aligner_MA6_part2_aligning-720p.mp4 Alignment]'''
'''Training videos: [https://www.youtube.com/watch?v=o8IBtfQHNzU Operation] [https://www.youtube.com/watch?v=rvUuXYgw-xU Alignment]'''


'''The user manual, APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 LabManager].'''
'''The user manual, APV, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=339 LabManager].'''
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