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Specific Process Knowledge/Lithography/Development: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,569 edits
Line 512: Line 512:
'''Utility recipes'''
'''Utility recipes'''
*UTIL-DR: Dome rinse.
*UTIL-DR: Dome rinse.
*UTIL-BE: Bottle empty. Danchip use only.
*UTIL-BE: Bottle empty. Nanolab use only.


=== Equipment performance and process related parameters ===
=== Equipment performance and process related parameters ===
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography/Development"