Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 258: | Line 258: | ||
**Oculars: 0.55mm x 1.1mm (Ø1.1mm full field) | **Oculars: 0.55mm x 1.1mm (Ø1.1mm full field) | ||
**Camera: 150µm x 200µm (300µm x 200µm full field) | **Camera: 150µm x 200µm (300µm x 200µm full field) | ||
BSA camera | |||
**Low: 1.5mm x 2mm (3mm x 2mm full field) | |||
* | **High: 450µm x 650µm (950µm x 650µm full field) | ||
* | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||