Specific Process Knowledge/Etch/III-V ICP/InP-InGaAsP-InGaAs: Difference between revisions
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*Comparing of this Cl2/H2 recipe with HBr recipe on e-beamed structures (By Aurimas @photonic) | *Comparing of this Cl2/H2 recipe with HBr recipe on e-beamed structures ''(By Aurimas Sakana @photonic (nov 2019)) | ||
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=== InP etch with Cl2/CH4/Ar 2013=== | === InP etch with Cl2/CH4/Ar 2013=== | ||